[{"word":"photolithography","phonetics":[],"meanings":[{"partOfSpeech":"noun","definitions":[{"definition":"A lithographic procedure in which printing plates are made using a photographic process.","synonyms":[],"antonyms":[]},{"definition":"An optical exposure process used in the manufacture of integrated circuits.","synonyms":[],"antonyms":[]}],"synonyms":[],"antonyms":[]}],"license":{"name":"CC BY-SA 3.0","url":"https://creativecommons.org/licenses/by-sa/3.0"},"sourceUrls":["https://en.wiktionary.org/wiki/photolithography"]}]